The alert centred on Leprino, a cheese factory, on the Steps Road near Magheralin, and began around 10.20pm last night.
Police, ambulance and fire crews responded.
A senior fire officer said it followed an accidental mixing of chemicals, which sparked a chemical reaction.
At one stage a 100-metre exclusion zone was in place around the scene.
People were warned to stay away during the alert, which continued until 4.50am this morning.
The five patients were taken to three local hospitals and have since been discharged. Their injuries were not serious.
There is no wider risk to the public, officials said.
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The NIFRS said four fire appliances