Tesla announced Thursday that shareholders had voted to approve the biggest pay package in history for CEO Elon Musk , in a deal worth up to $1 trillion over 10 years if the company meets a list of benchmarks such as selling 1 million humanoid robots.

Over 75% of shareholders voted in favor of the pay package, said Brandon Ehrhart, the company’s general counsel, as Tesla shareholders gathered in person and virtually for their annual meeting.

Musk is already the world’s wealthiest person, with a net worth of about $473 billion, according to the Bloomberg Billionaires Index . The compensation agreement could help to make him the world’s first member of the “Four Comma Club” with $1 trillion or more in riches.

Musk’s wealth has risen this year despite serious damage to Tesla’s brand

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