ASML Holding NV’s orders beat analyst expectations in the third quarter, as demand for its chip-making machines was fueled by hundreds of billions of dollars in investment into artificial intelligence infrastructure.

The Dutch semiconductor equipment maker reported €5.4 billion ($6.3 billion) in bookings in the period, it said in a statement Wednesday. That compares to €4.9 billion expected by analysts, according to data compiled by Bloomberg.

ASML, which is the only company that makes extreme ultraviolet lithography machines needed to produce the most sophisticated AI chips, is benefiting from the boom in spending. OpenAI, which has become the world’s most valuable startup off the back of its AI models, has already struck deals for data centers and chips that easily top $1 trillion.

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